Power Electronics
High Precision XY Nanopositioning Piezo Stage

High Precision XY Nanopositioning Piezo Stage

PI's P-763 XY nano-positioning stage is a new, more affordable addition to PI's wide range of piezo stage positioners.  The compact P-763 flexure-guided stage has a footprint of less than 3 x 3 inches (70 x 70 mm) while providing a 30 x 30mm aperture. With a large travel range of 200 x 200 microns this piezo positioning system is ideal for demanding applications such as image-stabilization, micro-lithography, nano-alignment, surface metrology, super-resolution microscopy and bio-nanotechnology and photonics and datacomm.

Exceptional reliability is guaranteed by PI's Mars-Rover tested ceramic-insulated piezo actuator technology which proved superior after 100 billion cycles life testing.

This high-performance XY nano-positioner is designed for cost-sensitive applications in OEM and research where very high precision, high throughput and fast step and settle in a few milliseconds are required. Equipped with capacitive, direct-metrology position sensors, the nano-positioning stage is also very well suited to static positioning applications where drift-free long term stability is essential.

The P-763.22C nano-positioning piezo stage is a multilayer-piezo driven stage, providing sub-nanometer resolution and rapid response for fast step and settle or high speed scanning applications. With its capacitive feedback, linearity of motion is exceptional, with only 0.02% deviation from a perfect straight line, when tested on a laser interferometer.

A variety OEM and bench top controllers are available to suit the user's budget and application and each PI piezo controller comes with a wealth of software tools and programming examples. PI's E-725 advanced digital-servo controller, for example provides up to 3 motion channels with 24 bit resolution and ultra-low noise DAC converters for excellent closed-loop performance. All motion and servo parameters can be user-optimized on the fly. A variety of digital and analog interfaces are integrated, communication interfaces via Ethernet, USB and RS-232 are available.

 

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