Power Electronics

High Accuracy, FMS Linear Stages for Metrology

Newport Corporation, introduces the last installment of high accuracy FMS stages for higher-end metrology applications. Developed specifically to address the needs of surface metrology applications, the FMSxxHA stages are available in 100, 200 and 300 mm models. Similar to the original FMS stages, these HA versions also feature smooth motion, low noise, high straightness and flatness.

With all-steel construction, the FMS Series combines high stiffness and thermal stability for robust, highly precise, and repeatable measurements. The crossed roller bearings in the FMS have an anti-creep feature to provide exceptionally smooth and straight motion, reducing measurement noise and measurement variability. The precision-ground, steel ball screw is designed for high-speed motion, enabling higher throughput. The FMSxxHA is driven by a stepper motor, with a linear encoder that provides exceptional on-axis accuracy down to 1µm and sub-micron bi-directional repeatability.

For added flexibility in gathering metrology data, the FMS Series is compatible with Newport's high-performance 8-axis XPS Universal Controller, an ESP-compatible, integrated controller/driver. Newport's new FMSxxHA product is ideal for surface metrology, surface profilometry and tribology applications.

Newport Corporation
Part Number: FMS

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